Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor
نویسندگان
چکیده
We report a new method of achieving tip–sample distance regulation in an atomic force microscope ~AFM!. A piezoelectric quartz tuning fork serves as both actuator and sensor of tip–sample interactions, allowing tip–sample distance regulation without the use of a diode laser or dither piezo. Such a tuning fork has a high spring constant so a dither amplitude of only 0.1 nm may be used to perform AFM measurements. Tuning-fork feedback is shown to operate at a noise level as low as that of a cantilever-based AFM. Using phase-locked-loop control to track excursions in the resonant frequency of a 32 kHz tuning fork, images are acquired at scan rates which are fast enough for routine AFM measurements. Magnetic force microscopy using tuning-fork feedback is demonstrated. © 1997 American Institute of Physics. @S0021-8979~97!03615-3#
منابع مشابه
Atomic Force Microscopy Sidewall Imaging with a Quartz Tuning Fork Force Sensor
Sidewall roughness measurement is becoming increasingly important in the micro-electromechanical systems and nanoelectronics devices. Atomic force microscopy (AFM) is an emerging technique for sidewall scanning and roughness measurement due to its high resolution, three-dimensional imaging capability and high accuracy. We report an AFM sidewall imaging method with a quartz tuning fork (QTF) for...
متن کاملForce-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy.
We have studied the dynamics of quartz tuning fork resonators used in atomic force microscopy taking into account the mechanical energy dissipation through the attachment of the tuning fork base. We find that the tuning fork resonator quality factor changes even in the case of a purely elastic sensor-sample interaction. This is due to the effective mechanical imbalance of the tuning fork prongs...
متن کاملOptimizing qPlus sensor assemblies for simultaneous scanning tunneling and noncontact atomic force microscopy operation based on finite element method analysis
Quartz tuning forks that have a probe tip attached to the end of one of its prongs while the other prong is arrested to a holder ("qPlus" configuration) have gained considerable popularity in recent years for high-resolution atomic force microscopy imaging. The small size of the tuning forks and the complexity of the sensor architecture, however, often impede predictions on how variations in th...
متن کاملCalibration of quartz tuning fork spring constants for non-contact atomic force microscopy: direct mechanical measurements and simulations
Quartz tuning forks are being increasingly employed as sensors in non-contact atomic force microscopy especially in the "qPlus" design. In this study a new and easily applicable setup has been used to determine the static spring constant at several positions along the prong of the tuning fork. The results show a significant deviation from values calculated with the beam formula. In order to und...
متن کاملComparison of force sensors for atomic force microscopy based on quartz tuning forks and length-extensional resonators
The force sensor is key to the performance of atomic force microscopy (AFM). Nowadays, most atomic force microscopes use micromachined force sensors made from silicon, but piezoelectric quartz sensors are being applied at an increasing rate, mainly in vacuum. These self-sensing force sensors allow a relatively easy upgrade of a scanning tunneling microscope to a combined scanning tunneling/atom...
متن کامل